Company: Trikon

Number of items: 1.

2003

Budd, C.J. and Richardson, G. (2003) Modelling of plasmas used for etching semiconductors. European Study Group with Industry > 46th ESGI [Bristol 31/3/2003 - 4/4/2003].

This list was generated on Sun Oct 12 13:10:48 BST 2008.