The MIIS Eprints Archive

Lubrication Layer Perturbations in Chemical-Mechanical Polishing

Bhattacharya, A. and Breward, C.J.W. and Gratton, M. and Evans, J. and Nicholas, M. and Please, C. and Schwendeman, D. and Surles, M. and Witelski, T. (2005) Lubrication Layer Perturbations in Chemical-Mechanical Polishing. [Study Group Report]

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Item Type:Study Group Report
Problem Sectors:Energy and utilities
Materials
Information and communication technology
Study Groups:US Workshop on Mathematical Problems in Industry > 21st MPI [Worcester 13/6/2005 - 17/6/2005]
Company Name:Araca Incorporated/Intelligent Planar (Tucson Arizona 85750)
ID Code:73
Deposited By:Gordon White
Deposited On:06 Jul 2006
Last Modified:22 Jun 2009 12:44

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